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Phys. Rev. B 80, 045205 (2009) [11 pages]

Simulation of piezoresistivity in n-type single-crystal silicon on the basis of the first-principles band structure

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Koichi Nakamura*
Office of Science and Engineering Research, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan

Yoshitada Isono
Department of Mechanical Engineering, Kobe University, Kobe 657-8501, Japan

Toshiyuki Toriyama
Department of Micro System Technology, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan

Susumu Sugiyama
Ritsumeikan Global Innovation Research Organization, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan

Received 11 March 2009; revised 26 May 2009; published 13 July 2009

We have simulated the piezoresistivity in n-type single-crystal bulk silicon based on the first-principles electronic band structure of model structures. Our simple procedure to calculate the piezoresistance coefficients is valid qualitatively and quantitatively for carrier electron transport in the multivalley conduction-band structure of n-type bulk silicon; the primitive longitudinal and transverse piezoresistance coefficients originate from the energy gap between the valleys, whereas the shear piezoresistance coefficient π44 arises from a distortion of the band energy surface in the valleys and can be presented clearly as a negative constant. The distinction between the origins of longitudinal, transverse, and shear piezoresistivity can be followed as a dependence on a carrier concentration or temperature.

© 2009 The American Physical Society

URL:
http://link.aps.org/doi/10.1103/PhysRevB.80.045205
DOI:
10.1103/PhysRevB.80.045205
PACS:
72.20.Fr, 72.80.Cw, 71.20.Mq

*Present address: Research Institute for Nanomachine System Technology, Ritsumeikan University, Kusatsu, Shiga 525–8577, Japan; koichi-a@st.ritsumei.ac.jp