corner
corner
APS » Journals » Phys. Rev. B » Volume 60 » Issue 12
< Previous Article | Next Article >

Phys. Rev. B 60, 9157–9164 (1999)

Surface-roughness effect on capacitance and leakage current of an insulating film

Download: PDF (122 kB) Buy this article Export: BibTeX or EndNote (RIS)

Y.-P. Zhao, G.-C. Wang, and T.-M. Lu
Department of Physics, Applied Physics, and Astronomy, and Center for Integrated Electronics and Electronics Manufacturing, Rensselaer Polytechnic Institute, Troy, New York 12180-3590

G. Palasantzas and J. Th. M. De Hosson
Department of Applied Physics, Materials Science Center, University of Groningen, Nijenborgh 4, 9747 AG Groningen, The Netherlands

Received 9 April 1999; published in the issue dated 15 September 1999

Effects of surface roughness on electrical properties of a thin insulating film capacitor with one smooth electrode plate and one rough electrode plate are investigated. The electrode plate roughness is described in terms of self-affine fractal scaling through the roughness exponent α, the root-mean square (rms) roughness amplitude w, and the correlation length ξ. The electric field, capacitance, and leakage current show similar qualitative changes with the roughness parameters: they all increase as w increases, and also increase as either ξ or α decreases.

© 1999 The American Physical Society

URL:
http://link.aps.org/doi/10.1103/PhysRevB.60.9157
DOI:
10.1103/PhysRevB.60.9157
PACS:
84.32.Tt, 77.22.Jp, 85.50.+k, 77.55.+f
 
< Previous Article | Next Article >