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Phys. Rev. B 58, 7300–7309 (1998)

Diffraction from anisotropic random rough surfaces

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Y.-P. Zhao, G.-C. Wang, and T.-M. Lu
Department of Physics, Applied Physics, and Astronomy and Center for Integrated Electronics and Electronics Manufacturing, Rensselaer Polytechnic Institute, Troy, New York 12180-3590

Received 8 April 1998; published in the issue dated 15 September 1998

The diffraction beam from an anisotropic, random, rough surface is investigated. Two kinds of anisotropic surfaces with either a correlation-length anisotropy or a scaling anisotropy are considered. For the correlation-length anisotropic surface with an isotropic scaling, the shape of the diffraction beam directly reflects the surface anisotropy under any diffraction condition. However, for the correlation-length anisotropic surface with an anisotropic scaling, the anisotropic scaling exponents may alter the anisotropy in the diffraction beam shape, sometimes even rotating the direction of anisotropy as the diffraction condition qw changes. Here q and w are the momentum transfer perpendicular to the surface and the interface width, respectively. This result demonstrates that one must be cautious when analyzing anisotropic diffraction beams. These results also provide a way to differentiate experimentally the correlation length anisotropy from the scaling anisotropy in anisotropic rough surfaces.

© 1998 The American Physical Society

URL:
http://link.aps.org/doi/10.1103/PhysRevB.58.7300
DOI:
10.1103/PhysRevB.58.7300
PACS:
61.14.Dc, 68.55.Jk, 02.50.-r