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Phys. Rev. B 56, 13380–13386 (1997)

N K-edge x-ray-absorption study of heteroepitaxial GaN films

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M. Katsikini
Department of Physics, Aristotle University of Thessaloniki, 54006 Thessaloniki, Greece
Hahn-Meitner Institute (A.S.), Glienicker Strasse 100, D-14109 Berlin, Germany

E. C. Paloura
Department of Physics, Aristotle University of Thessaloniki, 54006 Thessaloniki, Greece

M. Fieber-Erdmann
Hahn-Meitner Institute (A.S.), Glienicker Strasse 100, D-14109 Berlin, Germany

J. Kalomiros
Department of Physics, Aristotle University of Thessaloniki, 54006 Thessaloniki, Greece

T. D. Moustakas
College of Engineering, Boston University, Boston, Massachusetts 02215

H. Amano and I. Akasaki
Department of Electrical and Electronic Engineering, Meijo University, Nagoya 468, Japan

Received 10 February 1997; revised 14 August 1997; published in the issue dated 15 November 1997

The microstructure of GaN films grown by electron cyclotron resonance (ECR) molecular-beam epitaxy (MBE) and hydride vapor-phase epitaxy (HVPE) is studied using x-ray-absorption measurements at the N K edge. The local microstructure around the N atom is found to be distorted. The nearest neighbors of the N atom are four Ga atoms, N1 of which are located at a distance R1=1.95Å, which is expected, and N2 at a distance R2=R1+0.25Å. This distortion is more pronounced in the cubic ECR-MBE and the HVPE hexagonal samples where the ratio N2/N1 is equal to 1. In the rest of the samples the distortion is smaller and the ratio N2/N1 takes the value 0.33. Nitrogen deficiency is not detected in the second nearest-neighbor shell and the N atoms are found at the expected distance of 3.11 Å.

© 1997 The American Physical Society

URL:
http://link.aps.org/doi/10.1103/PhysRevB.56.13380
DOI:
10.1103/PhysRevB.56.13380
PACS:
61.10.Ht, 78.70.Dm, 71.55.Eq