Phys. Rev. B 37, 10803–10813 (1988)Polarized spectral emittance from periodic micromachined surfaces. II. Doped silicon: Angular variationReceived 16 February 1988; published in the issue dated 15 June 1988 The polarized directional spectral (3 μm≤λ≤14 μm) emittances (PDSE’s) of highly doped, micromachined, periodic structures on silicon were measured. These structures have dimensions that are comparable to the wavelengths of the measured radiation. Significant anisotropies and maxima were found for the s and p PDSE’s measured in emittance planes parallel and perpendicular to the grating-repeat vector. Wood’s singularities were clearly visible in the p PDSE on shallow gratings (depth ≤1.5 μm). Periodic maxima were observed in both the s and p PDSE in the emittance plane perpendicular to the grating vector due to standing-wave modes in the slots of the grating. It is concluded that the PDSE provides detailed information on the characteristics of the electromagnetic modes associated with surface microstructures. © 1988 The American Physical Society URL:
http://link.aps.org/doi/10.1103/PhysRevB.37.10803
DOI:
10.1103/PhysRevB.37.10803
PACS:
44.40.+a
See AlsoSee Also: Peter J. Hesketh, Jay N. Zemel, and Benjamin Gebhart, Polarized spectral emittance from periodic micromachined surfaces. I. Doped silicon: The normal direction, Phys. Rev. B 37, 10795 (1988). |
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